TOptical Coating Thickness system:
MPROBE™ a semiconsoft USA system is used for a wide range of coating thickness measurement applications: practically any translucent film in 1nm ‐1mm range can be measured quickly and accurately. There are two basic methods of data analysis – model fitting/curve fitting and FFT decomposition of the measured spectrum. Model fitting is used for thin films: 1nm to 1 μm, FFT decomposition is used for thicker films. In the 1μm to 20 μm range, either FFT or model fitting can be used, depending on the application requirements
Majority of translucent or lightly absorbing fi lms can be
measured quickly and reliably:Oxides, Nitrides, Photoresists,
Polymers, Semiconductors (Si, aSi, polySi), Hard
coatings (SiC, DLC), Polymer coatings (Paralene, PMMA,
Polyamides), thin metal fi lms and many more.
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